3/20/2019 0 Comments Advanced Energy Mdx-L12m Manual![]() This is an Advanced Energy MDX-10K standard impedance DC magnetron drive model 3152012-025T with user's manual, interlock keys, and analog/digital I/O plug. The dc magnetron drives in the MDX series prove just how convenient and efficient advanced. How Advanced Energy's MDX Products Manage Arcs. Tight regulation, superior arc quenching, and low stored output energy make MDX Series DC power supplies an industry leader. • In this software, you get drag and drop functions. • They have all latest feature with entirely free from any bugs. Internet download manager full with serial key. Product Specifications Rapid RPS 6 kW - P/N 3151801-000 Applied Materials AE Rapid Generator - P/N 0190-13025 Astron AX7651 - P/N 0920-00013 Astron i AX7670 - P/N 0920-00100 Astron i AX7670 - P/N 0190-24886 Astron i AX7680 - P/N 0920-00057 ENI DCG-100 - P/N 0190-08278 Astex/MKS Astron AX7650 - P/N FI20620 Astron AX7651 - P/N FI20620-1 Astron AX7670 - P/N FI80130 Astron AX7680 - P/N FI80131 Astron AX7680 - P/N FI80132 Astron AX7685 - P/N FI80133 ENI/MKS DCG-100 - P/N DCG2M-A041300110AL DCG-200Z - P/N DC21M-A. ARC-OUT™ ARC-OUT consists of a passive and an active circuit. The passive circuit is designed to control the energy level and the duration of small arcs. The active circuit comes into play when the arc is too large to extinguish with the passive circuit. ![]() This active part of ARC-OUT also protects the power supply from destructive high current levels resulting from short circuits. The passive part of ARC-OUT that controls small arcs consists primarily of an inductor and capacitor that form a resonant circuit. When an arc occurs in the chamber, the resulting lowered impedance across the output of the power supply permits the energy in the capacitor to be transferred to the inductor and then back again to the capacitor. The resulting oscillatory (ringing) waveform of current can cause the plasma current to actually reverse in polarity momentarily. This means that instead of supplying current to the load (and the arc), the MDX will temporarily draw current (electrons) from the load (Figure 1). This reversal will occur if the process voltage is above a certain minimum, the process current does not exceed a certain maximum, and the impedance of the arc is low enough. For most processes and arcs these conditions are met and the current will reverse. If the resonant circuit is able to reverse the current direction, the voltage of the load will go to zero (or even reverse slightly to positive) and the arc will be extinguished. This will happen in about 10 µs, and the process will continue without further interruption. It is important to note that the plasma in the chamber will not be extinguished, even though the voltage goes briefly to zero. Because the change happens so quickly, the ions do not have time to diffuse to the chamber walls, and the plasma does not need to be reignited. Because the arc is limited in both current and duration, any resultant damage is kept to a low level. Well over 95% of the arcs normally encountered in plasma processing are extinguished by this ringing circuit, and it is important to note that very little (well under 10%) of the energy stored in the power supply's output circuits is delivered to the arc in this case. If the conditions for current reversal are not met, the load voltage will not reverse, and the arc will not be extinguished. In this case, the output circuits of the power supply will continue to drive current into the arc, and the second part of the ARC-OUT circuit must be activated. All MDX products have been engineered not only to survive the severe environment of vacuum arcs, but also to provide a high level of arc control for the purpose of minimizing arc-related damage. Arc-related damage can be divided into three categories: • Damage to deposition targets, which is generally heat related • Contamination of the film resulting from foreign particles or target material particulates contacting the film and being included in it • Damage to growing films, caused by arcs striking or moving across the film surface Although the use of an MDX power supply can greatly reduce the possibility of vacuum chamber arcing, two specific electronic circuits in the MDX are designed to minimize the destructive effects of arcs that do occur. These trademarked circuits are ARC-OUT™ and ARC-CHECK™. 1 By John Harpold and Richard A. Scholl of Advanced Energy Industries, Inc. HOW ADVANCED ENERGY‚ MDX ™ PRODUCTS MANAGE ARCS WHITEPAPER (-) V olts (-) Amps ARC t=0 Microseconds Current ARC trip t = 30 µs S tar t r eco v e ry t = 8 ms 0 1 0 20 30 5 1 0 1 5 0 20 40 60 0 200 400 600 Milliseconds Figure 1. The passive circuit of ARC-OUT attempts unsuccessfully to quench a chamber arc.
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